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RFFI №15-08-01632 «The Fundamental Properties of Mechanisms of High-Rate Deposition of Functional Coatings by Using Magnetron Sputtering Systems» RSF №15-19-00026 «The Formation of Equipment and Technologies of High-Rate Deposition of Metallica Coatings by Using Magnetron Sputtering Systems» RFFI №13-08-00429 «The Investigation of Fundamental Aspects of Enerfy Dissipation and Material Transfer in Magnetron Sputtering Systems with Liquid-Phase Target»
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