RSF #15-19-00026 "Development of equipment and technologies for high-rate deposition of metal coatings using magnetron sputtering systems (MSS)".
RFBR #18-38-00676 "Regularities of formation of functional aluminum coatings at magnetron sputtering with a combined power supply".
RFBR #18-08-00454 "Investigation of fundamental aspects of the self-sputtering behavior of magnetron sputtering systems with evaporating metal targets and its impact on the properties of the deposited coatings".
RFBR #20-38-90134 "High-rate reactive magnetron deposition of protective coatings based on chromium nitride".
Расписание